Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
SPECIAL ANNOUNCEMENT
2016 Photonics Buyers' Guide Clearance! – Use Coupon Code FC16 to save 60%!
share
Email Facebook Twitter Google+ LinkedIn Comments

Newport Granted Second Patent on Core Technology to Enhance Semiconductor Equipment Manufacturing

Photonics.com
Aug 2001
IRVINE, Calif., Aug. 28 -- Newport Corporation announced that it has been issued its second US patent in a series of patent applications that extend the company's leadership in next-generation technology in the fabrication of semiconductor equipment products.

Newport's US Patent, covering improvements in 300 mm edge-grip robotic end effectors, includes technology that allows semiconductor equipment manufacturers to efficiently and reliably handle 300 mm wafers during fabrication and testing. The patent strengthens and deepens Newport's protection of its properties in this field and represents one of several relating to the technology of providing edge grip mechanisms for use in the semiconductor equipment industry.

The new system utilizes improved failsafe design features, which further minimize the potential for wafer mishandling, virtually eliminating wafer damage and particulate generation in the process of gripping and transferring the wafer from the cassette to the fabrication or metrology areas of the tools.



Comments
Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.