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ESI to Supply Infineon with 300 mm Laser Processing Systems

Photonics.com
Oct 2001
PORTLAND, Ore., Oct. 30 -- Electro Scientific Industries Inc. has won orders from Infineon Technologies for multiple Model 9820 laser semiconductor processing systems. The 300 mm systems will be installed at Infineon Technologies in Dresden, Germany. Delivery of the first systems took place during ESI's first fiscal quarter ended September 1, 2001. Further systems will ship during the current fiscal quarter, and throughout ESI's fiscal year ending on June 1, 2002.

The systems will be used in the production of Infineon's advanced DRAM products, on both 200 mm and 300 mm wafers. They are designed to be upgradeable to enable Infineon to process future generations of DRAM and logic devices.



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