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SEMI Honors Seven Photonics Developers

Photonics Spectra
Nov 2001
Semiconductor Equipment and Materials International recently honored seven photonics technology developers for their contributions to the advancement of semiconductor manufacturing technology: busHonors
  • Robert Knollenberg, chairman and CEO of Research Electro-Optics and founder and former CEO of Particle Measuring Systems, for his work in developing particle-detection and -sizing techniques.
  • Six pioneers in laser pattern-generation technology from Micronic Laser Systems and Etec Systems (formerly Ateq). The Micronic team comprised Anders Thuren, vice president of technology; Hans Buhre, chief technology officer; and Tor Sandstrom, vice president of strategic development.
At Etec, the developers were Paul Allen, director of system architecture in the laser patterning products group; Neil Berglund, a founder of Ateq and now president of Northwest Technology Group; and Paul Warkentin, another Ateq founder who is now general manager of the laser patterning products group and a vice president of Etec parent company Applied Materials.


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