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Cymer, LTB Lasertechnik Berlin Developing DUV Spectrometer

Photonics.com
May 2002
SAN DIEGO, May 22 -- Cymer Inc. and LTB Lasertechnik Berlin GmbH have agreed to jointly develop an advanced spectrometer for measuring the spectral performance of deep-ultraviolet (DUV) light sources.

Under the terms of the agreement, LTB will design, manufacture and distribute a next-generation version of its Emission Line Analyzing Spectrometer (ELIAS), for which the company will also provide field service. Cymer will provide intellectual property and standardize the interpretation of measurement data to enhance the spectrometer's performance, and will have exclusive marketing and sales rights in the semiconductor lithography market.



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