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Cognex Corp. - Smart Sensor 3-24 GIF LB

Measuring Birefringence in Calcium Fluoride at 157 nm

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Bob Wang, Mike Ward, Rick Rockwell and Jennifer List

As a practical matter, residual birefringence is supplanting intrinsic birefringence as a more important parameter for product quality control. In recent years, leading-edge optical lithography has been moving to ever-shorter wavelengths: from 248 nm (KrF excimer laser) to 193 nm (ArF excimer laser) and now to 157 nm (F2 excimer laser). At 157 nm, calcium fluoride (CaF2) is the primary lens material used in step-and-scan systems because of its optical properties and its readiness for mass production. These systems require extremely high quality material. Three parameters are especially...Read full article

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    Published: November 2002
    FeaturesindustrialSensors & Detectors

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