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Ultratech Chooses TMC Vibration Control System

Photonics.com
Feb 2003
PEABODY, Mass., Feb. 7 -- Technical Manufacturing Corp. (TMC) announced that Ultratech Stepper Inc. has chosen its Electro-Damp II Active Vibration Control System as the new platform for its 200- and 300-mm Saturn Spectrum and Titan Wafer Stepper family.

Ultratech plans to incorporate Electro-Damp II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology and optical networking applications.

Each patented Electro-Damp II system will include TMC’s DC-2000 digital controller, noncontacting electronic valving system, Gimbal Piston isolator and high-force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool.

For more information, visit: www.techmfg.com



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