Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

  • Ultratech Chooses TMC Vibration Control System
Feb 2003
PEABODY, Mass., Feb. 7 -- Technical Manufacturing Corp. (TMC) announced that Ultratech Stepper Inc. has chosen its Electro-Damp II Active Vibration Control System as the new platform for its 200- and 300-mm Saturn Spectrum and Titan Wafer Stepper family.

Ultratech plans to incorporate Electro-Damp II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology and optical networking applications.

Each patented Electro-Damp II system will include TMC’s DC-2000 digital controller, noncontacting electronic valving system, Gimbal Piston isolator and high-force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool.

For more information, visit:

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.