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Photonics.com
Apr 2003
Agilent Technologies Inc. announced it has launched a Web-based "one-stop shop" for engineers who need electronic design automation (EDA) technical information and support tools. The EEsof Knowledge Center, at www.agilent.com/find/eesof-support, provides technical documents, support examples, software downloads and discussion forums.   . . .   Veeco Instruments Inc. announced that International SEMATECH has installed its new Dimension X3D inline, 3-D lithography atomic force microscope metrology tool for advanced process development and high-volume semiconductor manufacturing. International SEMATECH's lithography and metrology divisions will use the Dimension X3D to characterize 90 nm and smaller device features in photolithography and etch applications, including photomask metrology.   . . .   Minneapolis-based Scanner Technologies Corp., a developer of 3-D device inspection technologies, announced it has begun shipping its new VisionFlex component inspection system.


GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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