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Laser-Based Micromachining Gets Practical

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Micromachining with Nd:YAG and excimer lasers, with their short pulse duration and high peak power, have come of age in applications ranging from display technology to semiconductor manufacturing.

Paula M. Powell

According to professor Y. Lawrence Yao and colleagues at Columbia University in New York, laser-based micromachining has advantages in micron- and millimeter-scale processing of high-strength materials where mechanical methods are not strong enough and etching-based methods are too slow. Typical devices used in such applications are the Q-switched Nd-YAG laser with nanosecond pulse width — especially its third harmonic of 355 nm — and the excimer laser. Such tools offer short pulse duration and high peak power to limit heat-affected zones in the workpiece. The following stories explore how...Read full article

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    Published: July 2003
    Columbia UniversityConsumerFeatureshigh-strength materialsindustriallaser-based micromachiningmicron-millimeter-scale processingY. Lawrence Yao

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