Therma-Wave Inc., a maker of process control metrology systems used in the manufacture of semiconductors, announced that Tokyo Electron Limited (TEL) has placed multiple follow-on orders for Therma-Wave's INTEGRA integrated metrology products for use with its coater developer and etch products. TEL plans to use the equipment in advanced development and production for 90 nm and 65 nm technologies. The INTEGRA products will be incorporated with the TEL CLEAN TRACK ACT and CLEAN TRACK LITHIUS coater developers, as well as Teliusetch systems.   . . .   Frederick A. Ball has been elected to Electro Scientific Industries Inc.'s board of directors. Ball was formerly senior vice president and CFO of Borland Software Corp. and was previously vice president of mergers and acquisitions for KLA-Tencor Corp. ESI, based in Portland, Ore., supplies manufacturing equipment to electronics markets.