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Hamamatsu Corp. - Earth Innovations LB 2/24

Fresnel Optics Investigated for Next-Generation Lithography

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Daniel S. Burgess

Achromatic Fresnel optical sys-tems under development at Xradia Inc. of Concord, Calif., promise to compete with mirror-based solutions for next-generation extreme-ultraviolet lithography in the production of integrated circuits. The researchers at the company suggest that using such optics rather than the multilayer mirrors would reduce fabrication complexity and cost, and that they would be suitable for use with broadband radiation sources. As they continue to stay apace with Moore's law, semiconductor chip manufacturers soon will require new tools to print the smaller feature sizes that...Read full article

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    Published: September 2003
    Achromatic Fresnel optical systemsBasic Scienceindustrialnext-generation extreme-ultraviolet lithographyResearch & TechnologyTech PulseXradia

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