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Microlithography Faces a 157-nm Question

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Even with Intel signaling its intent to bypass 157 nm, calcium fluoride will likely remain a critical optical material.

Konrad Knapp, Schott Lithotec AG

When Intel Corp. announced its intention to bypass 157-nm lithography last spring, it raised more questions than it answered for many in the lithography industry. However, it is important to recognize that this decision was most likely based on an assumption that key elements of the technology — such as calcium fluoride for optics, the pellicle and, to some extent, the photoresist — would not be available in the required quantities when needed. In the past, the industry’s road map decisions have almost always been based on consensus. In fact, the few exceptions, such as IBM’s strong...Read full article

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    Published: January 2004
    Glossary
    calcium fluoride
    An optical material used in place of crown glass to produce lenses with extraordinary correction of chromatic aberrations. Its high coefficient of thermal expansion and its tendency to absorb moisture limit its range of application.
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    photoresist
    Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a crucial component in the patterning of semiconductor wafers during the manufacturing process. The primary function of photoresist is to undergo a chemical or physical change when exposed to light, making it selectively soluble or insoluble in a subsequent development step. The general...
    calcium fluorideFeaturesindustrialIntel Corp.lithographyphotoresist

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