Search
Menu
Cognex Corp. - Smart Sensor 3-24 GIF LB

Hinds Instruments Wins Circle of Excellence Award

Facebook X LinkedIn Email
Exicor DUV

Exicor DUVThe development of lithography has been hindered by the lack of a deep-ultraviolet tool to measure birefringence in optical materials such as calcium fluoride. Visible measurement has encountered a high level of intrinisic birefringence in CaF2 at its operating wavelength of 157 nm. Now Hinds Instruments Inc. of Hillsboro, Ore., has designed a deep-UV system that provides low-level birefringence mapping of CaF2 and other optical materials at 157, 193 and 248 nm.

The Exicor DUV characterizes and quantifies intrinsic and residual birefringence in optical materials, providing critical information to help minimize aberrations and to qualify lens materials for optical lithography systems.

Its innovations include a photoelastic modulator that employs a proprietary optical material for accurate, efficient and reliable polarization modulation; a dual photoelastic modulator single-detector system that not only measures birefringence angle and mag-nitude simultaneously, but that also is durable and easily aligned; a purge system to minimize the oxygen-free volume; and a control to reduce temperature purge gas differentials in a sample.

The modulator has a wide acceptance angle, enabling measurement of birefringence in lenses when coupled with a large detector. This will be beneficial for telecommunications optics as well as visible and UV lenses.
Meadowlark Optics - Building system MR 7/23


Published: January 2004
Glossary
birefringence
Birefringence is an optical property of certain materials that causes them to exhibit different refractive indices for light of different polarizations. In other words, when light passes through a birefringent material, it splits into two separate rays, each traveling with a different speed and direction. This phenomenon is also known as double refraction. The difference in refractive indices for the two polarizations is a characteristic feature of birefringent materials. The separation of...
calcium fluoride
An optical material used in place of crown glass to produce lenses with extraordinary correction of chromatic aberrations. Its high coefficient of thermal expansion and its tendency to absorb moisture limit its range of application.
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
optical materials
Materials that, by virtue of their optical characteristics (i.e. refractive index, dispersion, etc.), are used in optical elements. See crystal; glass; plastic lens.
birefringencecalcium fluorideCommunicationsFeaturesHinds Instrumentsindustriallithographyoptical materialsSensors & Detectorsultraviolet tool

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.