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Intel, Cymer Sign EUV Agreement

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SAN DIEGO & SANTA CLARA, Calif., Jan. 26 -- Intel Corp. announced today an agreement to provide $20 million in funding to Cymer Inc., a supplier of deep ultraviolet (DUV) light sources used in semiconductor manufacturing, over the next three years to accelerate development of production-worthy extreme ultraviolet (EUV) lithography light sources. The companies said a key issue confronting the commercialization efforts of EUV lithography is the ability to increase source output power to meet the wafer throughput requirements of high-volume manufacturing, while minimizing the cost of owning EUV...Read full article

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    Published: January 2004
    Glossary
    deep ultraviolet
    Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the UV-A and UV-B regions. The exact wavelength range considered as DUV can vary, but it often includes wavelengths from around 100 to 300 nanometers. DUV light is shorter in wavelength and higher in energy than visible light. DUV light covers the spectrum from approximately 100 to 300 nanometers. This range is subdivided into different sub-bands, such as UV-C (100 to...
    extreme ultraviolet
    Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which corresponds to frequencies in the range of approximately 2.5 petahertz to 30 exahertz. This range is shorter in wavelength and higher in frequency compared to the far-ultraviolet and vacuum ultraviolet regions. Key points about EUV include: Source: EUV radiation is produced by extremely hot and energized...
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    Cymerdeep ultravioletDUVEUVextreme ultravioletindustrialIntellithographyNews & Featuressemiconductor manufacturing

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