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Three-Dimensional Process Sculpts Waveguides in Silicon

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Daniel S. Burgess

Researchers at the University of California, Los Angeles, have reported a technique that is based on the separation by implantation of oxygen process that enables the three-dimensional fabrication of waveguide and microcavity structures in silicon. The method promises applications in the development of optical chips, and it may be applied to the manufacture of wavelength division multiplexing filters. Separation by implantation of oxygen involves the selective formation of SiO2 layers in a silicon substrate by exposing the host to a source of oxygen ions and annealing the material at high...Read full article

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    Published: February 2004
    Communicationsmicrocavity structuresResearch & Technologysiliconthree-dimensional fabricationUniversity of California

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