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Photonics.com
Mar 2004
Newport Corp. announced it has received three orders for semiconductor capital equipment with a total value of $6 million. One system, purchased by a semiconductor equipment manufacturer, is a precision motion platform that will be incorporated into a laser-based processing tool. The system uses the advanced motion control technology of Newport's DynamYX wafer positioning stages to deliver movement in multiple axes. The other two orders, from a producer of semiconductor metrology tools, are for integrated opto-mechanical subassemblies. One forms part of an in-line wafer inspection system and the other is incorporated into a reticle metrology tool. The subassemblies feature high-performance laser optics, manufactured with Newport's magnetorheological finishing technology, and precision optical mounts. Newport said it expects to complete shipment of the orders this fall.. . .C. Mark Melliar-Smith has been appointed COO of Molecular Imprints Inc. (MII), an Austin, Texas, manufacturer of step and flash imprint lithography. Melliar-Smith, who is also a member of MII's board, was formerly CEO and president of International Sematech. Prior to that, he was CTO of Lucent Technologies Microelectronics, the forerunner of Agere Systems.


GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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