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Russian Company Expands Production with MOCVD Tool from Veeco

Photonics Spectra
May 2004
Veeco Instruments Inc. of Somerset, N.J., has received an order from Elma-Malachit for a TurboDisc D180 GaN metallorganic chemical vapor deposition tool. Based in Zelenograd, Russia, Elma-Malachit provides epitaxial wafers for the country's device industry. It will use the tool to produce GaN high-brightness LEDs for industrial applications. The precise process control and efficient performance provided by the D180 platform is expected to enable the company to advance its compound semiconductor activities to the next phase of mass production. Veeco's tool provides high yield while maintaining uniformity of thickness, doping and composition within grown epitaxial layers.


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