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Aixtron Garners Order for MOCVD System

Photonics Spectra
Mar 2005
Aixtron AG of Aachen, Germany, has received an order from Northrop Grumman Corp. of Los Angeles for a Thomas Swan close-coupled showerhead metallorganic chemical vapor deposition (MOCVD) mass production system. The 7 × 3-in. system will be used at Northrop Grumman's Linthicum, Md., facility for research and development and for the manufacture of AlGaN/GaN electrical devices. The company said that showerhead technology will improve control of composition and thickness uniformity and produce the material quality required for electronic devices.


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