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Low-Temp Fabrication of Piezoelectric Microactuators Demonstrated

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Anne L. Fischer

Scientists at Pennsylvania State University in University Park have produced flextensional microactuators the width of a human hair using a low-temperature bonding process. The devices feature a precision micromachined silicon beam coupled to lead zirconate titanate, a common piezoelectric material. Tiny actuators that achieve large displacements with controlled force and high resolution are in demand for use in radio-frequency and optical switches for such products as cell phones and wide-screen televisions. Piezoelectric films often are employed in such microscale actuators, but the...Read full article

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    Published: November 2005
    Basic Scienceflextensional microactuatorslow-temperature bonding processMicroscopyPennsylvania State UniversityResearch & TechnologyTech Pulse

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