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Nanometrics Buys Soluris

Photonics Spectra
May 2006
Nanometrics Inc., a supplier of metrology equipment to the semiconductor industry in Milpitas, Calif., has announced the acquisition of Soluris Inc., an overlay metrology company in Concord, Mass., for $7 million. Soluris was formed in 2003 through a management buyout of assets of the Schlumberger Ltd. semiconductor group. It offers the IVS 155, a tool for 200-mm semiconductor overlay and critical dimension measurement, and intellectual property.


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