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  • Alis Acquired by Carl Zeiss SMT
Sep 2006
OBERKOCHEN, Germany, Sept. 14, 2006 -- Carl Zeiss SMT AG this week closed its acquisition of Peabody, Mass.-based Alis Corp., a nanotechnology startup developing scanning ion microscopes and imaging systems. Specific terms of the deal were not disclosed.

Carl Zeiss SMT, a provider of lithography optics and optical and electron beam-based inspection and measuring systems, acquired the business for its Nano Technology Systems (NTS) Div., which is also based in Oberkochen. The 36 scientists and engineers currently employed by Alis will stay with the company, now a wholly owned subsidiary of Carl Zeiss SMT. Alis's core technology and research efforts will remain in Peabody, Mass., and there are plans to hire more staff to make its helium ion microscopes. Alis co-founders Bill Ward and Nick Economou will remain with the company, as chief technology officer and company CEO, respectively.

Carl Zeiss NTS said the helium ion microscopy technology developed by Alis will complement its scanning electron microscopy (SEM) technology and offer opportunities for subnanometer imaging, depth-of-focus capabilities and new image contrast features. "This will enable our customers in semiconductor manufacturing, materials and life science applications to further push existing technical boundaries and to meet their roadmap requirements beyond the current decade," said Carl Zeiss NTS Managing Director Dirk Stenkamp when the acquisition was first announced in July.

Alis was founded in 2005 and financed by Kodiak Venture Partners, Arch Ventures and Intel Capital. Carl Zeiss SMT was formed from the Carl Zeiss Semiconductor Technology Group in 2001. It was originally part of the Carl Zeiss Photo Div. For more information, visit: or

An atom that has gained or lost one or more electrons and, as a result, carries a negative or positive charge.
An instrument consisting essentially of a tube 160 mm long, with an objective lens at the distant end and an eyepiece at the near end. The objective forms a real aerial image of the object in the focal plane of the eyepiece where it is observed by the eye. The overall magnifying power is equal to the linear magnification of the objective multiplied by the magnifying power of the eyepiece. The eyepiece can be replaced by a film to photograph the primary image, or a positive or negative relay...
The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
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