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Suss Installs 200-mm Tools at Freescale's MEMS Facility

Photonics.com
Jan 2008
Suss MicroTec of Munich, Germany, a supplier of production, process and test technology for the semiconductor industry, announced it has installed several microelectromechanical systems (MEMS) production tools at Freescale Semiconductor's Oak Hill fabrication facility in Austin, Texas. The equipment includes a DSM200 series front-to-back alignment verification system and the latest-generation MA200 Compact series mask aligner, used in manufacturing MEMS, power semiconductors and optoelectronic devices, and an ABC200 series wafer bond cluster system for MEMS sensor applications. Freescale has the same equipment in its 150-mm fab in Sendai, Japan.


GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
sensor
1. A generic term for detector. 2. A complete optical/mechanical/electronic system that contains some form of radiation detector.
wafer
A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
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