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  • Bionanofluidic MEMS

Mar 2008
Springer.jpgAn addition to the “MEMS Reference Shelf” series, the 305-page book BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis for the development of biosensors for various applications. It demonstrates the interdisciplinary nature of bionanofluidics and microelectromechanical systems (MEMS) while addressing micromechanical and chemical sensor technologies. The fabrication processes for implementing the sensors are covered, including cleanroom lithography, etching, chemical vapor deposition, microsensor systems lamination, PDMS molding and parylene deposition. Chapters address areas such as micro- and nanointegration of biosensors, and stereolithography and rapid prototyping. Peter J. Hesketh, ed.; Springer Science+Business Media LLC, New York, 2008; $129.

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