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Method Measures Heat of Thin-Film Semiconductors

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With their complexity and materials changing, integrated circuits are generating more heat, creating a greater need to monitor that heat to improve efficiency and reliability. Researchers are measuring the thermal properties of various thin-film semiconducting materials, which differ significantly from the properties of bulk material. A group led by Peter Raad, a professor of mechanical engineering at Southern Methodist University in Dallas, built a probing station that includes a microscope -- accurate to the submicron range -- and a series of fiber optic lasers. Wafers are heated by a...Read full article

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    Published: February 1999
    MicroscopyResearch & TechnologyTech Pulse

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