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Cymer Adds 2 Science Advisers for EUV R&D

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Christopher Progler, PhD, and Patrick P. Naulleau, PhD, have joined the scientific advisory board of Cymer Inc., a San Diego supplier of light sources used in semiconductor lithography. Progler is chief technology officer and executive vice president of Photronics Inc., a maker of reticles and photomasks for semiconductor and microelectronic applications, is a SPIE fellow and board member and chairs the SPIE Advanced Lithography Symposium. He also represents Photronics on the board of managers for MP Mask Technology Center LLC, the company's joint venture with Micron Technology Inc. that produces photomasks for semiconductor manufacturing at a Photronics facility in Boise, Idaho. Progler is a guest lecturer at the University of Texas at Dallas School of Engineering and is on its industrial advisory board. He has published numerous papers and patents on lithography, is an associate editor for the Journal of Microlithography, Microfabrication and Microsystems,and is frequently a speaker at industry events. Naulleau is lead scientist at Lawrence Berkeley Lab’s Center for X-Ray Optics, in Berkeley, Calif., overseeing R&D and projects in nanolithography and nano-optic systems and components. He is also a visiting professor, electrical engineering and computer sciences, at the University of California, Berkeley, where he teaches a Fourier optics course and supervises graduate research. He was formerly an associate professor and senior research scientist at the University of Albany, State University of New York, where he led EUV activities and other research in nanolithography and nanometrology systems. He is the author of numerous papers and a conference presenter who holds more than 30 patents and invention disclosures.
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Published: April 2008
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
nano
An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
Christopher ProglerCymerEmploymentindustrialLight SourcesmetrologynanoNews BriefsPatrick P. NaulleauphotomasksphotonicsPhotonics Tech BriefsPhotronicsreticlessemiconductor lithographyLEDs

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