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Cymer Adds 2 Science Advisers for EUV R&D

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Christopher Progler, PhD, and Patrick P. Naulleau, PhD, have joined the scientific advisory board of Cymer Inc., a San Diego supplier of light sources used in semiconductor lithography. Progler is chief technology officer and executive vice president of Photronics Inc., a maker of reticles and photomasks for semiconductor and microelectronic applications, is a SPIE fellow and board member and chairs the SPIE Advanced Lithography Symposium. He also represents Photronics on the board of managers for MP Mask Technology Center LLC, the company's joint venture with Micron Technology Inc. that...Read full article

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    Published: April 2008
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    photonics
    The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
    Christopher ProglerCymerEmploymentindustrialLight SourcesmetrologynanoNews BriefsPatrick P. NaulleauphotomasksphotonicsPhotonics Tech BriefsPhotronicsreticlessemiconductor lithographyLEDs

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