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  • Cymer, Toshiba Reach Agreement

Photonics Spectra
Sep 2008
Cymer Inc. of San Diego has reached a multiunit agreement with Toshiba Corp. of Tokyo. Under the terms, the latter will include the American company’s krypton fluoride and argon fluoride light sources in its investment plan at its memory fabrication facility in Japan. In return, the Japanese company’s light sources and systems will receive support from its partner.

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