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Cymer, Toshiba Reach Agreement

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Cymer Inc. of San Diego has reached a multiunit agreement with Toshiba Corp. of Tokyo. Under the terms, the latter will include the American company’s krypton fluoride and argon fluoride light sources in its investment plan at its memory fabrication facility in Japan. In return, the Japanese company’s light sources and systems will receive support from its partner.
Deposition Sciences Inc. - Difficult Coatings - MR-8/23

Published: September 2008
argon fluoride light sourcesBusinessCymer Inc.krypton fluorideLight Sourceslight speed

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