Search
Menu
CASTECH INC - New Building the Bridge of Light

Zygo Sells New Defect Printability System to Sematech

Facebook X LinkedIn Email
MIDDLEFIELD, Conn., March 25 -- Zygo Corp. reports that International Sematech has purchased its new DPS-310 series of inspection/review tools that incorporate TINT Virtual Stepper Mask Defect Analysis software. The software enables customers to examine a photomask for defects during the mask certification process. Customers will be able to identify nuisance OPC-induced defects detected by automatic inspection systems, and determine the impact of mask defects upon process windows and CD control.

The DPS-310 will be delivered to RAVE LLC, an advanced reticle repair tool manufacturer being sponsored by International Sematech to develop the next generation repair tool. This system will be used to verify that the photomask repairs are successful and will not be printed on the wafers.
Cognex Corp. - Smart Sensor 3-24 GIF MR

Published: March 1999
News & Features

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.