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University, ASM Renew Pact

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ASM Microchemistry Ltd. and the department of chemistry at the University of Helsinki in Finland have renewed their long-term research agreement on atomic layer deposition (ALD), an advanced technology for depositing thin-film materials in a highly controlled manner for integrated circuits and other applications. The company is a subsidiary of the semiconductor-processing tool supplier ASM International NV of the Netherlands. The new agreement is a continuation of a five-year collaboration project started in 2004 and includes research funding for four doctoral students. As part of the collaboration, ASM has located its research and development unit at the university.
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Published: January 2009
Glossary
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
thin film
A thin layer of a substance deposited on an insulating base in a vacuum by a microelectronic process. Thin films are most commonly used for antireflection, achromatic beamsplitters, color filters, narrow passband filters, semitransparent mirrors, heat control filters, high reflectivity mirrors, polarizers and reflection filters.
ASM InternationalASM Microchemistryatomic layer depositionBasic Scienceintegrated circuitsNews BriefsphotonicsPhotonics Tech Briefsthin filmUniversity of Helsinki

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