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PI Receives Patent for Piezo Actuator Technology

Photonics Spectra
Jan 2009
PI (Physik Instrumente) LP of Auburn, Mass., a manufacturer of piezo actuators and precision motion-control equipment, has received a US patent for its development of multilayer ceramic actuators. Based on stress reduction and encapsulation technologies, the PICMA can address lifetime mechanisms common to other piezoelectric actuators. Applications include semiconductor test and measurement, nanopatterning, lithography and motion control.

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