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  • Rudolph Wins Patent Suit
Mar 2009
Rudolph Technologies Inc. of Minneapolis has received a favorable verdict in its patent infringement suit against Israeli manufacturer Camtek Ltd. concerning the former’s proprietary continuous-scan wafer inspection technology. The jury determined that all models of Camtek’s Falcon inspection system infringe Rudolph’s US Patent No. 6,826,298 for an automated wafer defect inspection system and a process for performing such inspections, which covers continuous wafer inspections using strobing lights. The technology is employed in the inspection tools used by Rudolph and its subsidiary August Technology Corp. In awarding approximately $6.8 million to Rudolph, the jury also rejected Camtek’s arguments that Rudolph’s patent is invalid. Rudolph said it will continue to pursue intellectual property protection for its proprietary continuous-scan wafer inspection systems outside the US.

The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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