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Rudolph Wins Patent Infringement Verdict

Photonics Spectra
May 2009
A jury has awarded Rudolph Technologies Inc. of Minneapolis approximately $6.8 million in a patent infringement suit against Camtek Ltd. of Migdal Ha’Emeq, Israel. The jury ruled that all models of Camtek’s Falcon inspection system infringe upon Rudolph’s US patent for an “Automated Wafer Defect Inspection System and a Process of Performing Such Inspection,” which covers continuous inspection of wafers using strobing illumination. The technology is used in the inspection tools of Rudolph and its subsidiary, August. The jury also rejected entirely the Israeli company’s argument that Rudolph’s patent is invalid.


GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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