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Partners Join Lithography Initiative

Photonics Spectra
May 1999
Months after unveiling plans to deliver optical lithography systems at 157 nm, Santa Clara, Calif.-based Silicon Valley Group has signed on several supplier companies to help bring its systems to market.

Lambda Physik in Fort Lauderdale, Fla., which recently commercialized an F2 laser, will collaborate with the company in testing its deep-ultraviolet laser. Tropel Corp. in Fairport, N.Y., will develop a miniscanner to support the 157-nm infrastructure. It will be available next year.

For its supply of calcium fluoride, a material valued for its ability to withstand 157-nm laser light without compromising performance, Silicon Valley Group has forged partnerships with Schott Glas' Optics Div. in Mainz, Germany, and Bicron of Solon, Ohio.


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