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Camtek Receives Permanent Injunction

Photonics Spectra
Nov 2009
The US District Court of Minneapolis has issued a permanent injunction against Camtek Ltd. of Israel. The developer of automated optical inspection systems for semiconductor manufacturing companies can no longer sell its Falcon line of inspection tools in the US. The tools relate to US Patent No. 6,826,298, which is owned by Rudolph Technologies Inc. of Flanders, N.J., and covers optical inspection of semiconductors using strobing illumination. The court awarded Rudolph, a designer and manufacturer of high-performance process control metrology systems, post-trial interest on lost profits.


GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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