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Plasma-Therm Sells 3 Versaline PECVD Systems

Photonics.com
Apr 2010
ST. PETERSBURG, Fla., April 29, 2010 — Plasma process equipment supplier, Plasma-Therm LLC announced that it has sold three Versaline PECVD systems to a South Korean LED manufacturer.

The systems were purchased to meet the capacity expansion needs for high-quality dielectric film deposition. The systems have been ordered additionally to complement the Florida company’s other systems currently installed at the LED manufacturer’s fabrication facility.

It utilizes the company’s fully integrated EndpointWorks, which facilitates accurate and repeatable real-time endpoint process control.

For more information, visit:  www.plasmatherm.com 


GLOSSARY
plasma
A gas made up of electrons and ions.
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