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Lithography System Order

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Pennsylvania State University of University Park has ordered Vistec Lithography Inc.’s EBPG5200 electron-beam lithography system for the National Science Foundation’s National Nanotechnology Infrastructure Network so as to support advanced nanotechnology research nationwide. The system will be installed at the university’s new Millennium Science Complex. Vistec, of Watervliet, N.Y., is a provider of electron-beam lithography equipment based on shaped-beam technology.
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Published: August 2010
Glossary
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
nano
An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
nanotechnology
The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
BusinessEBPG5200electron-beamelectron-beam lithographyindustriallight speedlithographyMillennium Science ComplexnanonanotechnologyNational Nanotechnology Infrastructure NetworkNational Science FoundationNSFOpticsPennsylvania State Universityshaped-beamVistecVistec Lithography Inc.

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