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JILA Comb Purifies Semiconductor Process

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BOULDER, Colo., Aug. 6, 2010 — In a step that could aid semiconductor manufacturing, scientists have invented an optical frequency comb that detects gas impurities that hamper production of photonic devices. Purity of ingredients is a constant concern for the semiconductor industry, because a mere trace of contaminants can damage or ruin tiny devices. In a step toward solving a long-standing problem in semiconductor manufacturing, scientists at JILA and collaborators have used their unique version of a “fine-toothed comb” to detect minute traces of contaminant molecules in the arsine gas used to make a...Read full article

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    Published: August 2010
    absorbing lightAgilent TechnologiesAmericasarsine gasCE-DFCSDARPAdefenseDefense Thread Reduction Agencyenergygas impuritiesgreen photonicsIII-V semiconductorsindustrialJILAlaser diodeslight pulsesLight SourcesMatheson Tri-GasNISToptical frequency combOpticsphotonic devicesResearch & Technologysemiconductor manufacturingsolar cellsUniversity of Colorado BoulderUS Air Force Office of Scientific ResearchLEDs

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