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  • Rudolph Acquires MKS Instruments Software Biz
Aug 2010
FLANDERS, N.J., Aug. 25, 2010 — Rudolph Technologies Inc. reported that it acquired selected assets of the Yield Dynamics software business from MKS Instruments of Andover, Mass., a global provider of technologies to power, control, measure and analyze advanced processes in high growth applications.

The company’s purchase includes selected assets and intellectual property related to MKS yield management software used by semiconductor manufacturers and fabless semiconductor suppliers. In addition to the software acquisition, approximately 35 engineering and applications personnel, most of whom are based in Tianjin, China, will join Rudolph’s data analysis and review business unit.

Because processes have become more challenging, manufacturers have become more dependent on data management systems to deliver fast, accurate process information analysis designed to automate decision-making and optimize yield.

MKS’ Yield Dynamics package includes Genesis Enterprise software, a fabwide yield management solution that combines both parametric and yield optimization in a unified platform with data mining and workflow development for all data sources.

Terms of the cash transaction were undisclosed.

Rudolph is a manufacturer of defect inspection, process control metrology and data analysis systems used by semiconductor device manufacturers worldwide. In addition, it provides process characterization equipment and software for wafer fabs and advanced packaging facilities.

For more information, visit: 

The science of measurement, particularly of lengths and angles.
process control
The collection and analysis of data relevant to monitoring the rate and quality of industrial production, either continuously or in batches. Corrections can be made manually or automatically, via a feedback control loop.
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