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Multiwavelength spectroscopy improves semiconductor quality

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Dr. Jörg Schwartz, [email protected]

A highly sensitive spectral measurement technique has been extended from biomedical breath analysis to industrial detection of impurities in semiconductor gases, according to a group from JILA, a joint institute of the National Institute of Standards and Technology (NIST) and the University of Colorado. Their method, called cavity-enhanced direct-frequency comb spectroscopy, uses a wavelength comb to increase speed and accuracy. Gases such as arsine are used for epitaxial techniques including molecular beam epitaxy or chemical vapor deposition to grow semiconductor devices such as...Read full article

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    Published: November 2010
    Glossary
    epitaxy
    A well controlled thin films technique for growing films with good crystal structure in ultra high vacuum environments at very low deposition rates. Epitaxy methods are well known for the growing of single crystals in which chemical reactions produce thin layers of materials whose lattice structures are identical to that of the substrate on which they are deposited. Some examples are molecular beam epitaxy, liquid phase epitaxy and vapor phase epitaxy. Molecular beam epitaxy is also commonly...
    frequency comb
    A frequency comb is a precise and regular series of equally spaced spectral lines, or frequencies, that are generated with great accuracy. The term "frequency comb" is often associated with the Nobel Prize-winning technique known as frequency comb spectroscopy, developed by John L. Hall and Theodor W. Hänsch in the 1990s. The technology has since become a powerful tool in various scientific and technological applications. Key points about frequency combs: Origin and development: The...
    laser spectroscopy
    That part of the science involved in the study of the theory and interpretation of spectra that uses the unique characteristics of the laser as an integral part in the development of information for analysis. Raman spectroscopy and emission spectroscopy are two areas where lasers are used.
    2D dispersive spectrometerarsineatmospheric chemistryAtmospheric Pressure Ionisation Mass SpectroscopyBasic Sciencebreath analysisbuild-up cavitycamerascavity enhanced direct frequency comb spectroscopycavity enhancementcavity ring down spectroscopyCE-DFCSdiode lasersenergyepitaxyErbium doped fibre ring laserFourier transform infrared spectrometersfrequency combgas contamination detectionhighly nonlinear fiberImagingindustrialintegrated circuitsJILAJoerg Schwartzlaser diodeslaser spectroscopyMatheson Tri-Gasmode-locked laserNISTResearch & Technologysemiconductor manufacturingsolar cellsspectroscopyTech Pulsetunable diode laser spectroscopyUniversity of Colorado at Bouldervirtually imaged phased arrayLasers

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