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A*STAR Institute, Picosun Team to Develop ALD

Photonics.com
Mar 2012
ESPOO, Finland, and SINGAPORE, March 28, 2012 — A*STAR Institute of Microelectronics (IME) and Picosun Oy, a Finland-based global manufacturer of atomic layer deposition (ALD) equipment, have partnered to develop advanced ALD techniques to enable continued growth in next-generation memories and solar cells.

IME and Picosun will jointly develop ALD and plasma-enhanced ALD (PEALD) processes for novel dielectrics and metals for applications in resistive switching nonvolatile memories, multilayer metal-insulator-metal capacitors, solar cells and advanced complementary metal oxide semiconductors (CMOS). Enabling integration of the processes with the devices for industrial applications will be the objective of the project.

“As the demand for Picosun’s ALD equipment is booming also in Asia, the presence of a local subsidiary along with local R&D partners and demo facilities equipped with Picosun ALD tools will be of immense help to provide … customer service, rapid demonstrations and product deliveries, and timely after sales and field service operations,” said Picosun CEO Kustaa Poutiainen.

IME, a research institute of the Science and Engineering Research Council of A*Star, bridges the research and development between academia and industry.

For more information, visit: www.ime.a-star.edu.sg or www.picosun.com  


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