IRVINE, Calif., July 10, 2012 — Newport Corp. has introduced a line of air-bearing stages designed for the 450-mm semiconductor wafer initiative.
The DynamYX Datum 450 and 450GT are based on the company’s DynamYX 300 series wafer processing and inspection platforms and are suited to handle the larger travel ranges, payloads and increased throughput requirements of next-generation 450-mm tools.
They deliver high-resolution dynamic positioning of a wafer chuck or similar substrate in two orthogonal translation axes from a single-plane carriage. For added flexibility, a vertical Z-axis with tip/tilt function and a rotary axis for wafer offset correction can be added on the carriage beneath the wafer chuck. Other options are available for encoder and interferometer feedback.
Linear motors minimize heat generation and apply drive forces through the center of gravity of the stage, resulting in long-term repeatability and dynamic performance. Maximum velocity reaches 1.5 m/s, with acceleration of 2 (Y axis) and 3 g (X axis). With a rated payload of 20 kg, the new 300-Hz natural frequency stages feature high accuracy (encoder feedback) at 50 nm (3 sigma) and high repeatability at 10 nm (3 sigma).
Highly differentiated and proprietary construction using advanced ceramics (SiC) yields lightweight and rigid structures with high natural frequencies and thermal stability. A low-profile monolithic stage architecture with integrated pressure-vacuum air bearings provides good stepping and scanning performance.
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