AUBURN, Mass., March 21, 2013 — The miCos MCS XY precision linear stage from PI (Physik Instrumente) LP offers resolution up to 5 nm and 0.2 µm repeatability for optical inspection of precision machined parts, material research, microscopy applications and topographical measurements in semiconductor and flat panel design.
The two-axis positioning system, driven by the SMC Hydra motion controller, can handle loads up to 45 lb and can achieve velocity ranges from 1 µm/s to 200 mm/s. The stage provides 102 mm of positioning range in both axes and achieves ±2-µm straightness/flatness of motion. It delivers angular precision with ±20 µrad yaw and ±40 µrad pitch.
Several motor and position feedback options are offered. For applications where closed-loop operation is not required, lower-cost open-loop stepper motors are offered. Available for higher-performance demands are stepper, DC servo and direct-drive electromagnetic noncontact linear motors.
The device can be combined with linear vertical and rotational stages and goniometric cradles.
To contact the manufacturer of this product, click here