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DSI ups lithography capacity for imaging, biosensing

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Thin-film optical coatings manufacturer Deposition Sciences Inc. (DSI) of Santa Rosa, Calif., has introduced a photolithography production line that can pattern 200-mm-diameter wafers. The patterning capability provides an enhanced view or enhanced detection in multispectral imaging tasks by fusing together information from different wavelength bands. Other applications for the wafers include biomedical sensing, food and industrial inspection, and more. A 200-mm-diameter wafer developed by Deposition Sciences has enhanced photolithography capability. Courtesy of DSI.Read full article

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    Published: May 2013
    Glossary
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    BiophotonicsbiosensingBusinessCoatingsDeposition SciencesDSIImagingindustriallithographyRapidScan

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