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Collaboration Creates Smaller Chip Features

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OBERKOCHEN and STUTTGART, Germany, April 1, 2014— A collaborative research agreement between Zeiss’ Semiconductor Manufacturing Technology business group and the Institut für Mikroelektronik Stuttgart (IMS CHIPS) has resulted in smaller chip features. However, to produce nanopatterned optical components that can deliver even smaller, more powerful, more energy efficient and less expensive chip features, IMS CHIPS needed a high-tech electron beam writer that is smaller and less expensive than traditional equipment. New smaller chip features made possible by nanopatterned optical components. Courtesy of Zeiss. Zeiss...Read full article

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    Published: April 2014
    Baden-WürttembergBusinessCommunicationsenergyEuro NewsEuropeGermanyImagingOpticsResearch & TechnologySemiconductor Manufacturing TechnologyWafersWinfried KaiserZeissnanopatterned optical componentschip featuresInstitut für Mikroelektronik StuttgartIMS CHIPSelectron beam writerhigh-precision lithography systemwafer scannersLasers

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