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  • Lambda Physik Wins Ordersfrom SVG Lithography Systems

Photonics Spectra
Feb 2000
FT. LAUDERDALE, Fla., Feb. 18 — Lambda Physik, a majority owned subsidiary of Coherent Inc., has received new orders for its NovaLine A4020 and NovaLine F2020 lasers from Silicon Valley Group (SVG). According to Dirk Basting, Lambda Physik's founder and president, the sale illustrates the importance of 193-nm technology for semiconductor manufacturing and shows that both companies are committed to the evolution of this technology.

The NovaLine A4020 is an argon-fluoride 193-nm laser that operates at a 4-kHz repetition rate with an output power of 40 watts. The laser provides a partially narrowed beam that Lambda Physik said was designed specifically for SVG Lithography System's high-NA, high-throughput scanner, the MS193.

The NovaLine F2020 is an F2 157-nm laser that functions at a repetition rate of 2 kHz, with a 20-W output power. The laser employs a patented line-selection resonator to provide single-line operation with a bandwidth of -1.5 pm (FWHM).

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