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Lambda Physik Wins Ordersfrom SVG Lithography Systems

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Lambda Physik, a majority owned subsidiary of Coherent Inc., has received new orders for its NovaLine A4020 and NovaLine F2020 lasers from Silicon Valley Group (SVG). According to Dirk Basting, Lambda Physik's founder and president, the sale illustrates the importance of 193-nm technology for semiconductor manufacturing and shows that both companies are committed to the evolution of this technology. The NovaLine A4020 is an argon-fluoride 193-nm laser that operates at a 4-kHz repetition rate with an output power of 40 watts. The laser provides a partially narrowed beam that Lambda Physik...Read full article

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    Published: February 2000
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