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  • Optical Metrology Breaks Barriers

Photonics Spectra
Aug 2016
Superresolution techniques break the diffraction limit; laser speckle analysis allows for better metrology of the tiniest features.

HANK HOGAN, CONTRIBUTING EDITOR, hank.hogan@photonics.com

At one time, the diffraction limit, half the wavelength of light, acted as a cutoff to optical measurement. That’s no longer the case. Superresolution techniques now allow optical metrology well below that point in the XY direction, while interferometry and other approaches produce precise optical measurement in the Z, or vertical, direction.

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GLOSSARY
interferometry
The study and utilization of interference phenomena, based on the wave properties of light.
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