Superresolution techniques break the diffraction limit; laser speckle analysis allows for better metrology of the tiniest features.
At one time, the diffraction limit, half the wavelength of light, acted as a cutoff to optical measurement. That’s no longer the case. Superresolution techniques now allow optical metrology well below that point in the XY direction, while interferometry and other approaches produce precise optical measurement in the Z, or vertical, direction.
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