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Motorola Licenses Numerical's Phase-Shifting Technology

Photonics.com
Jun 2000
SAN JOSE, Calif., June 2 -- Motorola's Semiconductor Products Sector has signed an agreement with Numerical Technologies Inc. to license Numerical's iN-Phase software and patented phase-shifting technology for the commercial production of high-end, high-performance integrated circuits.   James Vasek, photolithography technology manager at Motorola, said: Numerical's phase-shifting technology is now a key component in our high-performance process roadmap.   Motorola and Numerical have been cooperating since February of 1999; when Motorola utilized Numerical's phase-shifting technology to produce 0.1-µm feature sizes, constituting a sizeable increase in performance. Sources said that the new licensing agreement was a multi-million dollar deal that will be implemented over several years.


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