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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Cymer Ships First F2 Laser to Ultratech

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SAN DIEGO, June 9 -- Cymer Inc. has shipped its first ELX-6500F2 fluorine laser to Ultratech Stepper Inc. The laser was delivered to Ultratech Stepper's facility in Wilmington, Mass., and then integrated within the company's microstepper lithography tool, the XLS 157. Shipments of the microstepper were then sent to a major Japanese semiconductor consortium for use in leading-edge resist and materials characterization. Cymer said the fluorine (F2) laser enables the extension of optical lithography for devices with feature sizes below 100 nm (0.10 µm). As integrated circuits continue...Read full article

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    Published: June 2000
    industrialNews & Features

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