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Photronics and ASML to Develop Reticles for 0.10-µm Imaging

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JUPITER, Fla., June 14 -- Photronics Inc. and ASML have agreed to work together to develop advanced reticles to support the early characterization work of ASML's most advanced lithography systems. ASML MaskTools, a subsidiary of ASML, will provide optical extension technologies to enhance photolithography process latitude and improve IC yields in manufacturing. Terms of the joint development agreement were not disclosed. Reticles will be used to evaluate wafer results on ASML's 248-nm and 193-nm lithography systems. Photronics' research and development team will create reticles by using the...Read full article

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    Published: June 2000
    industrialNews & Features

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