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Cymer Inks Agreement with TuiLaser of Germany

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SAN DIEGO, Calif., Nov. 14 -- Cymer Inc., a provider of excimer laser illumination sources, has signed a development and cooperation agreement with TuiLaser AG, a producer of excimer laser technology and solutions for medical, industrial and scientific applications based near Munich, Germany. Cymer will use its know-how, combined with TuiLaser's excimer laser technology, to develop Cymer's excimer laser solutions beyond photolithography into other semiconductor industry-specific applications. The research and development phase of the project will take place at TuiLaser's facility in...Read full article

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    Published: November 2000
    industrialNews & Features

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